Products
Products
A stainless steel diaphragm valve using our original structure that is highly airtight
SUS-55L Series
Stainless Steel Diaphragm Valve
A stainless steel diaphragm valve using our original 55L structure that is highly airtight. The simple structure provides superior cost performance. Compatible with a variety of special high-pressure gases: fluorine gas mixture; special material gases for semiconductors and liquid crystals such as phosphine and arsine; high-purity, high-pressure gases such as high-purity helium and chlorine; and liquefied gases such as ammonia.
Features
- A low-cost model of a SUS316L diaphragm valve compatible with high-purity gas.
- The body is SUS316L stainless steel.
- The outlet is compatible with JIS, CGA, and various other standards.
- Types that allow installation of an orifice and clean valves for semiconductor and special material gases are available.
- Compatible with small cylinders (V1).
(Consult us for liquefied gases and the like.)
Specification
| Model | SUS-55L Series |
|---|---|
| Body material | SUS316L |
| Disc seat | PCTFE, PVDF |
| Max Working pressure | 14.70MPa |
| Temperature range | -20°C — +65°C |
| Flow coefficient Cv |
|
| Helium leak rate | 1.0 x 10-9 Pa・m3/sec |
| For ordering | Type of gas Connections Required regulations and standards If any options and special features |
High Pressure Valves
