Products

Products

Equipped with a mechanism to prevent loosening of the handle due to vibration.
A diaphragm valve with enhanced safety.
The lineup includes the FS-55L (soft resin seat structure) type and the FS-55LMT (metal touch seat structure) type.

FS-55L Series

Stainless Steel Diaphragm Valve

Uses our original 55L structure, which has a track record of reliability. It is compatible with fluorine gas mixture, high-purity helium, high-purity chlorine, and other high-pressure gases. The gland is equipped with a mechanism to prevent handle loosening, to prevent the handle being loosened by the vibration that occurs when using low-pressure liquefied gases.
FS-55LMT (metal touch seat) is ideal for gases that are incompatible with resin or highly corrosive gases.

Features

  • The standard model for high-purity gases (specialty gases for semiconductors) with a track record.
  • The handle opening and closing operation is light and smooth. A cylinder pressure of 14.7 MPa can be completely shut off by hand.
  • The Cv value is no less than 0.3, the reference value for compressed gas valves.
  • The body is SUS316L stainless steel.
  • Compatible with a variety of fluids: special material gases for semiconductors and liquid crystals such as phosphine and arsine; high-purity, high-pressure gases such as high-purity helium and high-purity chlorine; and liquefied gases such as ammonia.
  • A helium leak detector is used to measure the leakage of each piece (internal and external leaks).
  • Equipped with a mechanism at the gland to prevent loosening due to vibration.
  • Types that allow installation of an orifice inside the outlet are available.
Specification
Model FS-55L Series (FS-55LMT Metal Touch Seat Series)
Body material SUS316L
Disc seat

PCTFE, PVDF, Metal

Max Working pressure 14.70MPa
Temperature range -20°C — +65°C
Flow coefficient Cv
  • 0.3
Helium leak rate 1.0 x 10-9 Pa・m3/sec
For ordering Type of gas
Connections
Required regulations and standards
If any options and special features

pagetopへ